Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator
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چکیده
منابع مشابه
Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
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ژورنال
عنوان ژورنال: Sensors
سال: 2020
ISSN: 1424-8220
DOI: 10.3390/s20247081